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  1. 2025

  2. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

  3. 2024

  4. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024, PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS .

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  5. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024.

    Research output: Contribution to conference › Abstract

  6. Влияние доли азота на получение пленок AlN методом импульсного магнетронного распыления

    Богословцева, А. Л., 2024.

    Research output: Contribution to conference › Abstract

  7. Получение пленок AlN/Al на Si методом импульсного магнетронного распыления для активного слоя ОАВ-резонаторов

    Богословцева, А. Л., Капишников, А. В. & Гейдт, П. В., 2024, In: Техника радиосвязи. 1 (60), p. 75-83 9 p., 7.

    Research output: Contribution to journal › Conference article › peer-review

  8. 2023

  9. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

  10. Silicon surface patterning by glow discharge plasma

    Petrova, A. V., Bogoslovtseva, A. L., Starinskiy, S. V. & Safonov, A. I., Jun 2023, In: Journal of Applied Mechanics and Technical Physics. 64, 3, p. 472-477 6 p.

    Research output: Contribution to journal › Article › peer-review

  11. Oil–Water Separation on Hydrophobic and Superhydrophobic Membranes Made of Stainless Steel Meshes with Fluoropolymer Coatings

    Melnik, A., Bogoslovtseva, A., Petrova, A., Safonov, A. & Markides, C. N., Apr 2023, In: Water (Switzerland). 15, 7, 1346.

    Research output: Contribution to journal › Article › peer-review

  12. Получение пленок AlN/Al на Si методом импульсного магнетронного распыления для активного слоя ОАВ резонаторов

    Богословцева, А. Л., 2023.

    Research output: Contribution to conference › Abstract

  13. Получение пленок AlN/Al на Si методом импульсного магнетронного распыления для активного слоя ОАВ-резонаторов

    Богословцева, А. Л., Капишников, А. В. & Гейдт, П. В., 2023, Сборник тезисов VII Международной научно-технической конференции «Радиотехника, электроника и связь» (РЭиС-2023). p. 247

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  14. 2022

  15. Прецизионная система подачи рабочих газов высокой чистоты

    Кузнецов, А. Н., Chirikov, N. & Богословцева, А. Л., 22 Dec 2022, Редакционно-издательский центр НГУ, Patent No. 76, Priority date 22 Dec 2022

    Research output: Patent › Know-how registration

  16. 2021

  17. Contact line dynamics on a substrate coated with a fluoropolymer

    Kochkin, D. Y., Bogoslovtseva, A. L. & Kabov, O. A., 15 Dec 2021, In: Journal of Physics: Conference Series. 2119, 1, 012132.

    Research output: Contribution to journal › Conference article › peer-review

  18. Deposition of fluoropolymer coating on stainless steel surface from plasma of glow discharge

    Petrova, A. V., Bogoslovtseva, A. L. & Safonov, A. I., 15 Dec 2021, In: Journal of Physics: Conference Series. 2119, 1, 012125.

    Research output: Contribution to journal › Conference article › peer-review

  19. Effect of thermal annealing on the structure and properties of fluoropolymer coatings obtained by HW CVD

    Safonov, A. I., Bogoslovtseva, A. L., Sulyaeva, V. S., Kiseleva, M. S., Zhidkov, I. S. & Starinskiy, S. V., Sept 2021, In: Journal of Structural Chemistry. 62, 9, p. 1441-1446 6 p., 13.

    Research output: Contribution to journal › Article › peer-review

  20. Deposition of fluoropolymer coating on a metal mesh for manufacturing of oil-water emulsion separating membranes

    Мельник, А. В., Петрова, А. В., Богословцева, А. Л. & Сафонов, А. И., 19 Apr 2021, In: Journal of Physics: Conference Series. 1867, 1, 012012.

    Research output: Contribution to journal › Conference article › peer-review

  21. 2018

  22. Influence of catalyst material on growth rate and morphology of fluoropolymer coating deposited by Hot Wire CVD

    Timoshenko, N. I., Sulyaeva, V. S., Bogoslovtseva, A. L., Gatapova, E. Y. & Safonov, A. I., 28 Nov 2018, In: Journal of Physics: Conference Series. 1105, 1, 4 p., 012125.

    Research output: Contribution to journal › Conference article › peer-review

  23. Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

    Сафонов, А. И., Суляева, В., Богословцева, А. Л. & Тимошенко, Н. И., 1 Sept 2018, In: Journal of Applied Mechanics and Technical Physics. 59, 5, p. 842-846 5 p., 10.

    Research output: Contribution to journal › Article › peer-review

ID: 3496846