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Прецизионная система подачи рабочих газов высокой чистоты
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Patent
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Department of Physics
Overview
Cite this
Александр Николаевич Кузнецов
(Author)
Nikita Chirikov
(Author)
Алена Леонидовна Богословцева
(Author)
Original language
Russian
Patent number
76
Priority date
22.12.2022
Publication status
Published -
22 Dec 2022
State classification of scientific and technological information
47.09.49 Gases and gas mixtures
29.03.29 Vacuum technology in a physical experiment
ID: 42221323
