Research output: Contribution to journal › Conference article › peer-review
Translated title of the contribution | Deposition of AlN/Al on Si by pulsed magnetron sputtering for the active layer of BAW resonators |
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Original language | Russian |
Article number | 7 |
Pages (from-to) | 75-83 |
Number of pages | 9 |
Journal | Техника радиосвязи |
Issue number | 1 (60) |
Publication status | Published - 2024 |
ID: 61325130