Research output: Contribution to journal › Conference article › peer-review
| Translated title of the contribution | Deposition of AlN/Al on Si by pulsed magnetron sputtering for the active layer of BAW resonators |
|---|---|
| Original language | Russian |
| Article number | 7 |
| Pages (from-to) | 75-83 |
| Number of pages | 9 |
| Journal | Техника радиосвязи |
| Issue number | 1 (60) |
| Publication status | Published - 2024 |
ID: 61325130