Translated title of the contributionDeposition of AlN/Al on Si by pulsed magnetron sputtering for the active layer of BAW resonators
Original languageRussian
Article number7
Pages (from-to)75-83
Number of pages9
JournalТехника радиосвязи
Issue number1 (60)
Publication statusPublished - 2024

    OECD FOS+WOS

  • 2.02 ELECTRICAL ENG, ELECTRONIC ENG

ID: 61325130