Research output

1. Наноструктурирование поверхности полупроводников ионно-кластерным пучком аргона

   Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

2. Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment

   Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

3. Efficient nanopatterning of Ge surface induced by oblique argon cluster ion beam

   Research output: Contribution to journal › Article › peer-review

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