Research output

1. Efficient nanopatterning of Ge surface induced by oblique argon cluster ion beam

   Research output: Contribution to journal › Article › peer-review

2. Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

   Research output: Contribution to journal › Article › peer-review

3. Влияние ионно-кластерной бомбардировки на грубо полированную поверхность пластин монокристаллического германия

   Research output: Contribution to journal › Article › peer-review

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