Study of the Lattice Structure and Sound Velocity in AlN Films on a Silicon Substrate for the Development of Acoustic Resonators

Research output: Contribution to journal › Article › peer-review

Translated title of the contribution	Исследование решетчатой структуры и скорости звука в пленках AlN на кремниевой подложке для разработки акустических резонаторов
Original language	English
Pages (from-to)	54-62
Number of pages	9
Journal	Optoelectronics, Instrumentation and Data Processing
Volume	62
Issue number	1
DOIs	https://doi.org/10.3103/S875669902670007X
Publication status	Published - 11 Jun 2026

AlN, Raman scattering, infrared spectroscopy, sound velocity, terahertz time-domain spectroscopy

ID: 85085314