Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics

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    Research areas

  • QC Physics

Research interests

Deposition of thin films

2022 - master's degree on the topic: Deposition of fluoropolymer coatings on surfaces with developed geometry using the Hot Wire Chemical Vapor Deposition method

2020 - bachelor's degree on the topic: The influence of gas-dynamic
parameters for the process of deposition of fluoropolymer coatings
Hot Wire Chemical Vapor Deposition method

Research output

  1. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Research output: Contribution to journal › Article › peer-review

  2. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  3. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

    Research output: Contribution to conference › Abstract

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Activities

  1. 9th International Congress on Energy Fluxes and Radiation Effects

    Activity: Participating in or organising an event › Participating in a conference, workshop, ...

  2. Двадцать восьмая Всероссийская научная конференция студентов-физиков и молодых ученых ВНКСФ-28

    Activity: Participating in or organising an event › Participating in a conference, workshop, ...

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