Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics

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    Research areas

  • QC Physics

Research interests

Deposition of thin films

2022 - master's degree on the topic: Deposition of fluoropolymer coatings on surfaces with developed geometry using the Hot Wire Chemical Vapor Deposition method

2020 - bachelor's degree on the topic: The influence of gas-dynamic
parameters for the process of deposition of fluoropolymer coatings
Hot Wire Chemical Vapor Deposition method

Research output

  1. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Research output: Contribution to journal › Article › peer-review

  2. Silicon surface patterning by glow discharge plasma

    Research output: Contribution to journal › Article › peer-review

  3. Oil–Water Separation on Hydrophobic and Superhydrophobic Membranes Made of Stainless Steel Meshes with Fluoropolymer Coatings

    Research output: Contribution to journal › Article › peer-review

View all (12) »

ID: 3496846