Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics

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Research interests

Investigation of surface morphology, elemental composition, phase composition, structure by scanning electron microscopy, energy dispersive spectroscopy, backscattered electron diffraction

Research output

  1. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Research output: Contribution to journal › Article › peer-review

  2. Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study

    Research output: Contribution to journal › Article › peer-review

  3. Stability of graphene film on copper, silicon, and glass substrates in contact with boiling water

    Research output: Contribution to journal › Article › peer-review

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