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Original languageEnglish
Article number125935
Number of pages9
JournalPhysica Scripta
Volume100
Issue number12
Publication statusPublished - 17 Dec 2025

    OECD FOS+WOS

  • 1.03.UI PHYSICS, MULTIDISCIPLINARY

    Research areas

  • thin films, mechanical stresses, AlN, magnetron sputtering

ID: 72866845