Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics

Contact

Кафедра физики СУНЦ

Contact

Research interests

Research output

  1. Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering

    Research output: Contribution to journal › Article › peer-review

  2. Features of the Structure and Properties of the ta-C Coatings Deposited from Filtered Flows of the Pulsed Cathodic-Arc Discharge

    Research output: Contribution to journal › Article › peer-review

  3. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Research output: Contribution to journal › Article › peer-review

View all (12) »

Activities

  1. 9th International Congress on Energy Fluxes and Radiation Effects

    Activity: Participating in or organising an event › Participating in a conference, workshop, ...

View all (1) »

ID: 12586369