Research output

1. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

   Research output: Contribution to journal › Article › peer-review

2. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

   Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research

3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

   Research output: Contribution to journal › Article › peer-review

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