Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics

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Research interests

Research output

  1. Study of the Lattice Structure and Sound Velocity in AlN Films on a Silicon Substrate for the Development of Acoustic Resonators

    Research output: Contribution to journal › Article › peer-review

  2. АКУСТИЧЕСКИЕ РЕЗОНАТОРЫ ГГц-ДИАПАЗОНА С БРЭГГОВСКИМ ОТРАЖАТЕЛЕМ, ВЫРАЩЕННЫЕ МЕТОДОМ ИМПУЛЬСНОГО МАГНЕТРОННОГО НАПЫЛЕНИЯ

    Research output: Contribution to conference › Abstract

  3. ОПТИЧЕСКАЯ ЭМИССИОННАЯ СПЕКТРОСКОПИЯ ПЛАЗМЫ ПРИ МАГНЕТРОННОМ РАСПЫЛЕНИИ ПЛЕНОК НИТРИДА АЛЮМИНИЯ

    Research output: Contribution to conference › Abstract

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Activities

  1. 9th International Congress on Energy Fluxes and Radiation Effects

    Activity: Participating in or organising an event › Participating in a conference, workshop, ...

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