Research output

1. Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering

   Research output: Contribution to journal › Article › peer-review

2. Features of the Structure and Properties of the ta-C Coatings Deposited from Filtered Flows of the Pulsed Cathodic-Arc Discharge

   Research output: Contribution to journal › Article › peer-review

3. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

   Research output: Contribution to journal › Article › peer-review

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