Research output

1. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

   Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

2. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

   Research output: Contribution to conference › Abstract

3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

   Research output: Contribution to journal › Article › peer-review

View all (8) »