Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering › Research Explorer

DOI

https://doi.org/10.3390/coatings13071281
Final published version

Original language	English
Article number	1281
Number of pages	13
Journal	Coatings
Volume	13
Issue number	7
DOIs	https://doi.org/10.3390/coatings13071281
Publication status	Published - Jul 2023

Research areas

acoustic resonator layer, aluminum nitride films, hexagonal structure, magnetron sputtering, piezoelectric force microscopy

OECD FOS+WOS

2.05 MATERIALS ENGINEERING

ID: 55449323