1. Aluminium nitride thin films surface smoothing by argon cluster ions

    Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

  2. Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions

    Korobeishchikov, N. G., Nikolaev, I. V., Roenko, M. A., Yakovlev, V. V., Pelenovich, V., Fu, D. J. & Tosltogouzov, A., Sept 2020, In: Vacuum. 179, 5 p., 109555.

    Research output: Contribution to journalArticlepeer-review

  3. Borate nonlinear optical single crystal surface finishing by argon cluster ion sputtering

    Korobeishchikov, N. G., Nikolaev, I. V., Atuchin, V. V., Prosvirin, I. P., Tolstogouzov, A., Pelenovich, V. & Fu, D. J., Dec 2021, In: Surfaces and Interfaces. 27, 101520.

    Research output: Contribution to journalArticlepeer-review

  4. Diagnostics of argon cluster ion beam for materials treatment

    Korobeishchikov, N. G., Nikolaev, I. V. & Roenko, M. A., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 5 p., 032016.

    Research output: Contribution to journalConference articlepeer-review

  5. Effect of argon cluster ion beam on fused silica surface morphology

    Korobeishchikov, N. G., Nikolaev, I. V. & Roenko, M. A., 1 Jan 2019, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 438, p. 1-5 5 p.

    Research output: Contribution to journalArticlepeer-review

  6. Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

    Nikolaev, I. V., Korobeishchikov, N. G. & Lapega, A. V., Jun 2024, In: Moscow University Physics Bulletin. 79, 3, p. 330-335 6 p.

    Research output: Contribution to journalArticlepeer-review

  7. Effect of gas cluster species on crater formation for fused silica

    Николаев, И. В., Стишенко, П. В., Яковлев, В. В. & Коробейщиков, Н. Г., 1 Nov 2023, In: Journal of Non-Crystalline Solids. 619, 8 p., 122590.

    Research output: Contribution to journalArticlepeer-review

  8. Efficient nanopatterning of Ge surface induced by oblique argon cluster ion beam

    Коробейщиков, Н. Г., Николаев, И. В. & Лапега, А. В., 1 Aug 2024, In: Materials Letters. 368, 4 p., 136710.

    Research output: Contribution to journalArticlepeer-review

  9. Features of the Cluster-Ion Treatment of the Surface of a KGd(WO4)2:Nd Single Crystal

    Николаев, И. В. & Коробейщиков, Н. Г., Apr 2024, In: Journal of Surface Investigation. 18, 2, p. 313-317 5 p.

    Research output: Contribution to journalArticlepeer-review

  10. Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

    Korobeishchikov, N. G., Nikolaev, I. V. & Roenko, M. A., 1 Mar 2019, In: Technical Physics Letters. 45, 3, p. 274-277 4 p.

    Research output: Contribution to journalArticlepeer-review

Previous 1 2 3 4 5 6 7 Next

ID: 12592622