Aluminium nitride thin films surface smoothing by argon cluster ions › Research Explorer

DOI

https://doi.org/10.1109/EFRE47760.2020.9242187
Final published version

Original language	English
Title of host publication	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	722-725
Number of pages	4
ISBN (Electronic)	9781728126869
DOIs	https://doi.org/10.1109/EFRE47760.2020.9242187
Publication status	Published - 14 Sept 2020
Event	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation Duration: 14 Sept 2020 → 26 Sept 2020

Publication series

Name	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Country/Territory	Russian Federation
City	Virtual, Tomsk
Period	14.09.2020 → 26.09.2020

Research areas

Aluminium nitride thin films, Atomic force microscopy (AFM), Gas cluster ion beam, Surface smoothing

ID: 27086290