Effect of gas cluster species on crater formation for fused silica

Original language	English
Article number	122590
Number of pages	8
Journal	Journal of Non-Crystalline Solids
Volume	619
DOIs	https://doi.org/10.1016/j.jnoncrysol.2023.122590
Publication status	Published - 1 Nov 2023

Cluster ion, Crater formation, Fused silica, MD simulation, Sputtering efficiency, Surfaces and interfaces

ID: 54428692