Research output

1. Comparative nanopatterning of single-component semiconductors using oblique argon cluster ion bombardment

   Research output: Contribution to journal › Article › peer-review

2. Динамика столкновений кластеров аргона с поверхностью полупроводниковых материалов

   Research output: Contribution to conference › Abstract › peer-review

3. Effect of gas cluster species on crater formation for fused silica

   Research output: Contribution to journal › Article › peer-review

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