Original languageEnglish
Article number109555
Number of pages5
JournalVacuum
Volume179
DOIs
Publication statusPublished - Sept 2020

    OECD FOS+WOS

    Research areas

  • Gas cluster ion beam, Impact crater, Lithium triborate, Nonlinear optical single crystal, Surface sputtering, BEAM, CRATER FORMATION, DEGRADATION, CSLIB6O10, SILICON SURFACES

ID: 24589950