Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	330-335
Number of pages	6
Journal	Moscow University Physics Bulletin
Volume	79
Issue number	3
DOIs	https://doi.org/10.3103/S0027134924700462
Publication status	Published - Jun 2024

cluster ion beam, power spectral density function of roughness, single-crystal germanium, surface smoothing, surface treatment

ID: 60513651