Cluster Ion Treatment of the Surface of Single-Crystal Silicon and Germanium at an Angle of 60°

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	163-166
Number of pages	4
Journal	Journal of Surface Investigation
Volume	19
Issue number	1
DOIs	https://doi.org/10.1134/S1027451025700259
Publication status	Published - Jun 2025

nanostructuring, semiconductors, single crystals, gas cluster, cluster ion beam, atomic force microscopy, surface morphology, surface roughness

ID: 68110313