Effect of argon cluster ion beam on fused silica surface morphology

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	438
DOIs	https://doi.org/10.1016/j.nimb.2018.10.019
Publication status	Published - 1 Jan 2019

Cluster ion beam, Fused silica, Mean cluster size, Power spectral density roughness, Surface smoothing, ENERGY, OPTICAL-SURFACES, ROUGHNESS

ID: 17247893