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  1. 2023

  2. Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases

    Николаев, И. В., Стишенко, П. В., Коробейщиков, Н. Г. & Яковлев, В. В., 26 Jul 2023, In: AIP Conference Proceedings. 2784, 4 p., 040005.

    Research output: Contribution to journal › Article › peer-review

  3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

  4. Obtaining the Effective Dielectric Permittivity of a Conducting Surface in the Terahertz Range via the Characteristics of Surface Plasmon Polaritons

    Gerasimov, V. V., Nikitin, A. K., Lemzyakov, A. G., Azarov, I. A. & Kotelnikov, I. A., Jul 2023, In: Applied Sciences (Switzerland). 13, 13, 7898.

    Research output: Contribution to journal › Article › peer-review

  5. Распыление поверхности плавленого кварца ионно-кластерным пучком

    Коробейщиков, Н. Г., Николаев, И. В. & Стишенко, П. В., 15 Jun 2023, p. 220-221. 2 p.

    Research output: Contribution to conference › Abstract › peer-review

  6. Silicon surface patterning by glow discharge plasma

    Petrova, A. V., Bogoslovtseva, A. L., Starinskiy, S. V. & Safonov, A. I., Jun 2023, In: Journal of Applied Mechanics and Technical Physics. 64, 3, p. 472-477 6 p.

    Research output: Contribution to journal › Article › peer-review

  7. Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack

    Volodin, V. A., Cheng, Y., Bulgakov, A. V., Levy, Y., Beránek, J., Nagisetty, S. S., Zukerstein, M., Popov, A. A. & Bulgakova, N. M., Jun 2023, In: Optics and Laser Technology. 161, p. 10 109161.

    Research output: Contribution to journal › Article › peer-review

  8. Formation of Anomalous Craters upon Bombardment of the Surface of a Lithium-Triborate Single Crystal by Cluster Ions

    Коробейщиков, Н. Г., Николаев, И. В., Роенко, М. А. & Яковлев, В. В., 11 May 2023, In: Journal of Surface Investigation. 17, 1, p. 163-167 5 p.

    Research output: Contribution to journal › Article › peer-review

  9. Ultrafast Infrared Laser Crystallization of Amorphous Si/Ge Multilayer Structures

    Bulgakov, A. V., Beránek, J., Volodin, V. A., Cheng, Y., Levy, Y., Nagisetty, S. S., Zukerstein, M., Popov, A. A. & Bulgakova, N. M., 6 May 2023, In: Materials. 16, 9, 3572.

    Research output: Contribution to journal › Article › peer-review

  10. Enhanced InAs phase formation in the In+- and As+-implanted SiO2 films covered with Si3N4 layers

    Tyschenko, I., Si, Z., Volodin, V., Cherkova, S. & Popov, V., 1 May 2023, In: Materials Letters. 338, 134041.

    Research output: Contribution to journal › Article › peer-review

  11. Electron-Beam Radiation Effects in Multilayer Structures Grown with the Periodical Deposition of Si and CaF2 on Si(111)

    Dvurechenskii, A. V., Kacyuba, A. V., Kamaev, G. N., Volodin, V. A., Stepina, N. P., Zinovieva, A. F. & Zinovyev, V. A., May 2023, In: Materials Today: Proceedings. 14, 1, 68.

    Research output: Contribution to journal › Conference article › peer-review

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ID: 75607337