Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack › Research Explorer

DOI

https://doi.org/10.1016/j.optlastec.2023.109161
Final published version

V. A. Volodin
Yuzhu Cheng
A. V. Bulgakov
Y. Levy
J. Beránek
S. S. Nagisetty
M. Zukerstein
A. A. Popov
N. M. Bulgakova

Original language	English
Article number	109161
Pages (from-to)	10
Journal	Optics and Laser Technology
Volume	161
DOIs	https://doi.org/10.1016/j.optlastec.2023.109161
Publication status	Published - Jun 2023

Research areas

Explosive low-temperature crystallization, Germanium/silicon multilayer stack, Nonlinear light absorption, Raman spectroscopy, Selective crystallization, Ultrashort infrared laser crystallization

OECD FOS+WOS

2.02 ELECTRICAL ENG, ELECTRONIC ENG
2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 49082613