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Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases

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DOI

https://doi.org/10.1063/5.0140411
Final published version

Original language	English
Article number	040005
Number of pages	4
Journal	AIP Conference Proceedings
Volume	2784
DOIs	https://doi.org/10.1063/5.0140411
Publication status	Published - 26 Jul 2023

OECD FOS+WOS

1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 53262407