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  1. Effect of argon cluster ion beam on fused silica surface morphology

    Korobeishchikov, N. G., Nikolaev, I. V. & Roenko, M. A., 1 Jan 2019, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 438, p. 1-5 5 p.

    Research output: Contribution to journal › Article › peer-review

  2. Diagnostics of argon cluster ion beam for materials treatment

    Korobeishchikov, N. G., Nikolaev, I. V. & Roenko, M. A., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 5 p., 032016.

    Research output: Contribution to journal › Conference article › peer-review

  3. Comparative nanopatterning of single-component semiconductors using oblique argon cluster ion bombardment

    Коробейщиков, Н. Г., Николаев, И. В., Стишенко, П. В. & Яковлева, М. В., Dec 2025, In: Materials Science in Semiconductor Processing. 200, 11 p., 110016.

    Research output: Contribution to journal › Article › peer-review

  4. Cluster Ion Treatment of the Surface of Single-Crystal Silicon and Germanium at an Angle of 60°

    Николаев, И. В., Коробейщиков, Н. Г. & Лапега, А. В., Jun 2025, In: Journal of Surface Investigation. 19, 1, p. 163-166 4 p.

    Research output: Contribution to journal › Article › peer-review

  5. Borate nonlinear optical single crystal surface finishing by argon cluster ion sputtering

    Korobeishchikov, N. G., Nikolaev, I. V., Atuchin, V. V., Prosvirin, I. P., Tolstogouzov, A., Pelenovich, V. & Fu, D. J., Dec 2021, In: Surfaces and Interfaces. 27, 101520.

    Research output: Contribution to journal › Article › peer-review

  6. Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions

    Korobeishchikov, N. G., Nikolaev, I. V., Roenko, M. A., Yakovlev, V. V., Pelenovich, V., Fu, D. J. & Tosltogouzov, A., Sept 2020, In: Vacuum. 179, 5 p., 109555.

    Research output: Contribution to journal › Article › peer-review

  7. Aluminium nitride thin films surface smoothing by argon cluster ions

    Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

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