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  1. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

  2. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

  3. Properties of ta-C coatings prepared by pulsed cathodic arc source at various distances

    Chepkasov, S., Zolkin, A., Piliptsou, D., Gladkikh, E. & Kravchuk, K., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 6 p., 032066.

    Research output: Contribution to journal › Conference article › peer-review

  4. Synthesis of amorphous hydrogenated carbon (a-C: H) films on Germanium by the use of the linear anode layer source

    Zolkin, A., Semerikova, A., Chepkasov, S. & Khomyakov, M., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 6 p., 032095.

    Research output: Contribution to journal › Conference article › peer-review

  5. The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

    Chepkasov, S., Khomyakov, M., Zolkin, A., Maksimovskii, E. & Piliptsou, D., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 856-862 7 p. 9242030. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  6. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024, PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS .

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  7. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024.

    Research output: Contribution to conference › Abstract

  8. Аналитический и технологический исследовательский центр "Высокие технологии и наноструктурированные материалы" ФФ НГУ: история, становление и достигнутые результаты

    Гейдт, П. В., Аржанников, А. В., Асеев, А. Л., Шкляев, А. А., Володин, В. А., Азаров, И. А., Зайковский, В. И., Utkin, D., Ларичев, Ю. В., Чепкасов, С. Ю. & Кузнецов, С. А., 17 Dec 2022, In: Сибирский физический журнал. 17, 3, p. 66-88 23 p., 9.

    Research output: Contribution to journal › Article › peer-review

  9. Способ и устройство управления концентрацией азота в пленках AlN получаемых при магнетронном распылении

    Гейдт, П. В. & Чепкасов, С. Ю., 29 Dec 2021, Редакционно-издательский центр НГУ, Patent No. 52, Priority date 28 Dec 2021

    Research output: Patent › Know-how registration

ID: 12586369