The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows › Research Explorer

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The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

DOI

https://doi.org/10.1109/EFRE47760.2020.9242030
Final published version

Sergey Chepkasov
Maksim Khomyakov
Alexander Zolkin
Evgeniy Maksimovskii
Dmitry Piliptsou

Original language	English
Title of host publication	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	856-862
Number of pages	7
ISBN (Electronic)	9781728126869
DOIs	https://doi.org/10.1109/EFRE47760.2020.9242030
Publication status	Published - 14 Sept 2020
Event	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation Duration: 14 Sept 2020 → 26 Sept 2020

Publication series

Name	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Country/Territory	Russian Federation
City	Virtual, Tomsk
Period	14.09.2020 → 26.09.2020

Research areas

AFM, Ellipsometry, Incidence angle, Nanoindentation, Pulsed vacuum arc, Raman spectroscopy, SEM, Tetrahedral amorphous carbon coatings

ID: 27085517