1 - 6 out of 6Page size: 10
  1. 2023

  2. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

  3. 2024

  4. Di- and Octanuclear 1,2-Dimethylpyridinium and 3-Bromo-1-Ethylpyridinium Iodoantimonates(III): Crystal Structure and Physicochemical Properties

    Shentseva, I. A., Tagiltsev, K. A., Usol’tsev, A. N., Korobeynikov, N. A., Shayapov, V. R., Sokolov, M. N. & Adonin, S. A., 2024, In: Russian Journal of Inorganic Chemistry. 7 p.

    Research output: Contribution to journal › Article › peer-review

  5. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024, PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS .

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  6. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024.

    Research output: Contribution to conference › Abstract

  7. 2025

  8. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

  9. Effect of Deposition and Annealing Temperatures on the Phase Composition of TiO2 Films Obtained by Atomic Layer Deposition from Titanium Tetrachloride and Water

    Khizhnyak, E. A., Shayapov, V. R., Korolkov, I. V., Dudkina, S. P., Geydt, P. V. & Lebedev, M. S., 10 Mar 2025, In: Journal of Structural Chemistry. 66, 2, p. 293-303 11 p.

    Research output: Contribution to journal › Article › peer-review

ID: 36957520