Effect of Deposition and Annealing Temperatures on the Phase Composition of TiO2 Films Obtained by Atomic Layer Deposition from Titanium Tetrachloride and Water

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	293-303
Number of pages	11
Journal	Journal of Structural Chemistry
Volume	66
Issue number	2
DOIs	https://doi.org/10.1134/S0022476625020088
Publication status	Published - 10 Mar 2025

anatase, annealing, atomic layer deposition, rutile, thin films, titanium dioxide

ID: 65066732