Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TIO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER |
|---|---|
| Original language | Russian |
| Article number | 140578 |
| Journal | Журнал структурной химии |
| Volume | 66 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2025 |
ID: 74043890