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  1. Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

    Nikolaev, I. V., Korobeishchikov, N. G. & Lapega, A. V., Jun 2024, In: Moscow University Physics Bulletin. 79, 3, p. 330-335 6 p.

    Research output: Contribution to journal › Article › peer-review

  2. Cluster Ion Treatment of the Surface of Single-Crystal Silicon and Germanium at an Angle of 60°

    Николаев, И. В., Коробейщиков, Н. Г. & Лапега, А. В., Jun 2025, In: Journal of Surface Investigation. 19, 1, p. 163-166 4 p.

    Research output: Contribution to journal › Article › peer-review

  3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

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