11 - 12 out of 12Page size: 10
  1. 2023

  2. Silicon surface patterning by glow discharge plasma

    Petrova, A. V., Bogoslovtseva, A. L., Starinskiy, S. V. & Safonov, A. I., Jun 2023, In: Journal of Applied Mechanics and Technical Physics. 64, 3, p. 472-477 6 p.

    Research output: Contribution to journal › Article › peer-review

  3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

Previous 1 2 Next

ID: 3496846