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  1. 2023

  2. Silicon surface patterning by glow discharge plasma

    Petrova, A. V., Bogoslovtseva, A. L., Starinskiy, S. V. & Safonov, A. I., Jun 2023, In: Journal of Applied Mechanics and Technical Physics. 64, 3, p. 472-477 6 p.

    Research output: Contribution to journal › Article › peer-review

  3. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.

    Research output: Contribution to journal › Article › peer-review

  4. 2024

  5. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024, PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS .

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  6. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

    Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю. & Гейдт, П. В., 2024.

    Research output: Contribution to conference › Abstract

  7. Влияние доли азота на получение пленок AlN методом импульсного магнетронного распыления

    Богословцева, А. Л., 2024.

    Research output: Contribution to conference › Abstract

  8. Получение пленок AlN/Al на Si методом импульсного магнетронного распыления для активного слоя ОАВ-резонаторов

    Богословцева, А. Л., Капишников, А. В. & Гейдт, П. В., 2024, In: Техника радиосвязи. 1 (60), p. 75-83 9 p., 7.

    Research output: Contribution to journal › Conference article › peer-review

  9. 2025

  10. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

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