Сергей Юрьевич Чепкасов - Research output › Research Explorer

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Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering
Шаяпов, В. Р., Богословцева, А. Л., Чепкасов, С. Ю., Капишников, А. В., Milekhin, I., Миронова, М. И. & Гейдт, П. В., 17 Dec 2025, In: Physica Scripta. 100, 12, 9 p., 125935.
Research output: Contribution to journal › Article › peer-review
Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering
Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V. & Geydt, P. V., Jul 2023, In: Coatings. 13, 7, 13 p., 1281.
Research output: Contribution to journal › Article › peer-review

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ID: 12586369