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Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering. / Шаяпов, Владимир Равильевич; Богословцева, Алена Леонидовна; Чепкасов, Сергей Юрьевич et al.

In: Physica Scripta, 17.12.2025.

Research output: Contribution to journal › Article › peer-review

Harvard

Шаяпов, ВР, Богословцева, АЛ, Чепкасов, СЮ, Капишников, АВ, Milekhin, I, Миронова, МИ & Гейдт, ПВ 2025, 'Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering', Physica Scripta. <https://iopscience.iop.org/article/10.1088/1402-4896/ae2993>

APA

Шаяпов, В. Р., Богословцева, А. Л., Чепкасов, С. Ю., Капишников, А. В., Milekhin, I., Миронова, М. И., & Гейдт, П. В. (2025). Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering. Physica Scripta. https://iopscience.iop.org/article/10.1088/1402-4896/ae2993

Vancouver

Шаяпов ВР, Богословцева АЛ, Чепкасов СЮ, Капишников АВ, Milekhin I, Миронова МИ et al. Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering. Physica Scripta. 2025 Dec 17.

Author

Шаяпов, Владимир Равильевич ; Богословцева, Алена Леонидовна ; Чепкасов, Сергей Юрьевич et al. / Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering. In: Physica Scripta. 2025.

BibTeX

@article{35da3dc416494008b14525bbf4265d5b,
title = "Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering",
author = "Шаяпов, {Владимир Равильевич} and Богословцева, {Алена Леонидовна} and Чепкасов, {Сергей Юрьевич} and Капишников, {Александр Владимирович} and Ilya Milekhin and Миронова, {Мария Ивановна} and Гейдт, {Павел Викторович}",
year = "2025",
month = dec,
day = "17",
language = "English",
journal = "Physica Scripta",
issn = "0031-8949",
publisher = "IOP Publishing Ltd.",

}

RIS

TY - JOUR

T1 - Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering

AU - Шаяпов, Владимир Равильевич

AU - Богословцева, Алена Леонидовна

AU - Чепкасов, Сергей Юрьевич

AU - Капишников, Александр Владимирович

AU - Milekhin, Ilya

AU - Миронова, Мария Ивановна

AU - Гейдт, Павел Викторович

PY - 2025/12/17

Y1 - 2025/12/17

M3 - Article

JO - Physica Scripta

JF - Physica Scripta

SN - 0031-8949

ER -

ID: 72866845