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  1. Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020):

    Коробейщиков, Н. Г., Николаев, И. В., Роенко, М. А., Гейдт, П. В. & Струнин, В. И., 2020, Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. . Томск, p. 256 1 p.

    Research output: Chapter in Book/Report/Conference proceeding › Article in an anthology › peer-review

  2. Surface processing of amorphous optical materials by argon cluster ion beam

    Nikolaev, I. V., Korobeishchikov, N. G., Roenko, M. A. & Antonenko, A. K., 28 Nov 2018, In: Journal of Physics: Conference Series. 1105, 1, 5 p., 012134.

    Research output: Contribution to journal › Conference article › peer-review

  3. Surface polishing of a KTP single crystals by argon cluster ions: Ion-Surface Interactions (ISI–2019). Proceedings of the XXIV International Conference, August 19–23, Moscow, Russia. 2019. V. 3. P. 239-241

    Коробейщиков, Н. Г., Николаев, И. В. & Роенко, М. А., 2019, Ion-Surface Interactions (ISI–2019). Proceedings of the XXIV International Conference.. p. 239-241 3 p.

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  4. Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment

    Николаев, И. В., Коробейщиков, Н. Г. & Лапега, А. В., 16 Sept 2024, p. 291. 1 p.

    Research output: Contribution to conference › Abstract › peer-review

  5. Surface nanostructuring of KTP crystal by cluster ion bombardment

    Николаев, И. В. & Коробейщиков, Н. Г., 2022, p. 264. 1 p.

    Research output: Contribution to conference › Abstract › peer-review

  6. Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield

    Tolstogouzov, A., Mazarov, P., Ieshkin, A. E., Belykh, S. F., Korobeishchikov, N. G., Pelenovich, V. O. & Fu, D. J., Jun 2021, In: Vacuum. 188, 110188.

    Research output: Contribution to journal › Article › peer-review

  7. Smoothing of Polycrystalline AlN Thin Films with Argon Cluster Ions

    Nikolaev, I. V., Korobeishchikov, N. G., Roenko, M. A., Geydt, P. V. & Strunin, V. I., Apr 2021, In: Technical Physics Letters. 47, 4, p. 301-304 4 p., 12.

    Research output: Contribution to journal › Article › peer-review

  8. Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases

    Николаев, И. В., Стишенко, П. В., Коробейщиков, Н. Г. & Яковлев, В. В., 26 Jul 2023, In: AIP Conference Proceedings. 2784, 4 p., 040005.

    Research output: Contribution to journal › Article › peer-review

  9. Simple method to gas cluster size determination based on molecular beam cross-section

    Korobeishchikov, N. G. & Penkov, O. I., 1 Mar 2016, In: Vacuum. 125, p. 205-208 4 p.

    Research output: Contribution to journal › Article › peer-review

  10. Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation

    Коробейщиков, Н. Г., Стишенко, П. В., Николаев, И. В. & Яковлев, В. В., Nov 2022, In: Plasma Chemistry and Plasma Processing. 42, 6, p. 1223-1235 13 p.

    Research output: Contribution to journal › Article › peer-review

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