Ultra-smooth surface polishing by argon cluster ion beam: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5.

Research output: Contribution to conference › Paper › peer-review