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  1. 2020

  2. Aluminium nitride thin films surface smoothing by argon cluster ions

    Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  3. Potassium titanyl phosphate sputtering features by argon cluster ions

    Nikolaev, I., Korobeishchikov, N. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 526-528 3 p. 9242181. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  4. Formation of irregular morphology on nanostructured surface by gas cluster ion beam

    Pelenovich, V., Zeng, X., Zuo, W., Tolstogouzov, A., Korobeishchikov, N., Fu, D. & Yang, B., 1 Dec 2020, In: Vacuum. 182, 4 p., 109705.

    Research output: Contribution to journal › Article › peer-review

  5. 2021

  6. Influence of the Parameters of Cluster Ions on the Formation of Nanostructures on the KTP Surface

    Николаев, И. В. & Коробейщиков, Н. Г., 2021, Formation of Advanced Nanomaterials by Gas-Phase Aggregation. Multidisciplinary Digital Publishing Institute (MDPI), p. 97-102 6 p. 7

    Research output: Chapter in Book/Report/Conference proceeding › Article in an anthology › peer-review

  7. Сглаживание тонких поликристаллических пленок AlN кластерными ионами аргона

    Николаев, И. В., Коробейщиков, Н. Г., Роенко, М. А., Гейдт, П. В. & Струнин, В. И., 12 Jan 2021, In: Письма в Журнал технической физики. 47, 6, p. 44-47 4 p.

    Research output: Contribution to journal › Article › peer-review

  8. Influence of the Parameters of Cluster Ions on the Formation of Nanostructures on the KTP Surface

    Николаев, И. В. & Коробейщиков, Н. Г., 23 Jan 2021, In: Applied Nano. 2, 1, p. 25-30 6 p., 3.

    Research output: Contribution to journal › Article › peer-review

  9. Smoothing of Polycrystalline AlN Thin Films with Argon Cluster Ions

    Nikolaev, I. V., Korobeishchikov, N. G., Roenko, M. A., Geydt, P. V. & Strunin, V. I., Apr 2021, In: Technical Physics Letters. 47, 4, p. 301-304 4 p., 12.

    Research output: Contribution to journal › Article › peer-review

  10. Особенности обработки кластерными ионами аргона поликристаллических пленок AlN на подложках из ситалла и Si

    Николаев, И. В., Коробейщиков, Н. Г., Гейдт, П. В. & Струнин, В. И., 25 May 2021, p. 31. 1 p.

    Research output: Contribution to conference › Abstract › peer-review

  11. Селективное распыление поверхности монокристаллов трибората лития ионно-кластерным пучком аргона

    Коробейщиков, Н. Г., Николаев, И. В., Атучин, В. В. & Просвирин, И. П., 25 May 2021, p. 10. 1 p.

    Research output: Contribution to conference › Abstract › peer-review

  12. Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield

    Tolstogouzov, A., Mazarov, P., Ieshkin, A. E., Belykh, S. F., Korobeishchikov, N. G., Pelenovich, V. O. & Fu, D. J., Jun 2021, In: Vacuum. 188, 110188.

    Research output: Contribution to journal › Article › peer-review

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