Formation of irregular morphology on nanostructured surface by gas cluster ion beam › Research Explorer

Novosibirsk State University's Research Portal

Formation of irregular morphology on nanostructured surface by gas cluster ion beam

Research output: Contribution to journal › Article › peer-review

Applied Physics Division

DOI

https://doi.org/10.1016/j.vacuum.2020.109705
Final published version

Vasiliy Pelenovich
Xiaomei Zeng
Wenbin Zuo
Alexander Tolstogouzov
Nikolay Korobeishchikov
Dejun Fu
Bing Yang

Original language	English
Article number	109705
Number of pages	4
Journal	Vacuum
Volume	182
DOIs	https://doi.org/10.1016/j.vacuum.2020.109705
Publication status	Published - 1 Dec 2020

OECD FOS+WOS

Research areas

Gas cluster ion beam, Si nanopowder, Smoothing effect, Surface nanostructures, BOMBARDMENT

ID: 24984532