Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Сглаживание тонких поликристаллических пленок AlN кластерными ионами аргона |
|---|---|
| Original language | English |
| Article number | 12 |
| Pages (from-to) | 301-304 |
| Number of pages | 4 |
| Journal | Technical Physics Letters |
| Volume | 47 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Apr 2021 |
ID: 34976742