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  1. Aluminium nitride thin films surface smoothing by argon cluster ions

    Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  2. A High-Efficiency Method for Scanning Supersonic Jets of Rarefied Gases

    Yaskin, A. S., Kalyada, V. V., Zarvin, A. E. & Chinenov, S. T., 1 Jul 2020, In: Instruments and Experimental Techniques. 63, 3, p. 430-434 5 p.

    Research output: Contribution to journal › Article › peer-review

  3. Accelerated cluster ion beams for materials processing: XXXI International Conference on Phenomena in Ionized Gases (ICPIG XXXI). Granada, Spain. 14-19 July 2013. Proceedings. PS2-095.

    Korobeishchikov, N. G., Kalyada, V. V., Zarvin, A. E. & Shmakov, A. A., 2013.

    Research output: Contribution to conference › Paper › peer-review

  4. Abnormal excitation of argon radiation upon electron-beam activation in condensed supersonic jets of mixtures: XXXI International Conference on Phenomena in Ionized Gases (ICPIG XXXI). Granada, Spain. 14-19 July 2013. Proceedings. PS2-085.

    Madirbaev, V. G., Zarvin, A. E. & Korobeishchikov, N. G., 2013.

    Research output: Contribution to conference › Paper › peer-review

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