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THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. / Богословцева, Алена Леонидовна; Капишников, Александр Владимирович; Шаяпов, Владимир Равильевич и др.

9th International Congress on Energy Fluxes and Radiation Effects. 2024.

Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференциинаучная

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Богословцева, АЛ, Капишников, АВ, Шаяпов, ВР, Чепкасов, СЮ & Гейдт, ПВ 2024, THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. в 9th International Congress on Energy Fluxes and Radiation Effects. 9th International Congress on Energy Fluxes and Radiation Effects, Томск, Российская Федерация, 16.09.2024.

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BibTeX

@inproceedings{9c80c7c21e2e4e8bbed7ee2f5f1bc129,
title = "THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING",
author = "Богословцева, {Алена Леонидовна} and Капишников, {Александр Владимирович} and Шаяпов, {Владимир Равильевич} and Чепкасов, {Сергей Юрьевич} and Гейдт, {Павел Викторович}",
note = "The work was supported by the Ministry of Science and Higher Education of the Russian Federation (project No. FSUS-2024-0020) ; 9th International Congress on Energy Fluxes and Radiation Effects ; Conference date: 16-09-2024 Through 21-09-2024",
year = "2024",
language = "English",
booktitle = "9th International Congress on Energy Fluxes and Radiation Effects",
url = "https://efre.ru/",

}

RIS

TY - GEN

T1 - THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

AU - Богословцева, Алена Леонидовна

AU - Капишников, Александр Владимирович

AU - Шаяпов, Владимир Равильевич

AU - Чепкасов, Сергей Юрьевич

AU - Гейдт, Павел Викторович

N1 - Conference code: 9

PY - 2024

Y1 - 2024

UR - https://efre.ru/files/abstracts/C4-P-011902-1710235141-q8lI.pdf

M3 - Conference contribution

BT - 9th International Congress on Energy Fluxes and Radiation Effects

T2 - 9th International Congress on Energy Fluxes and Radiation Effects

Y2 - 16 September 2024 through 21 September 2024

ER -

ID: 65177816