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THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. / Богословцева, Алена Леонидовна; Капишников, Александр Владимирович; Шаяпов, Владимир Равильевич et al.

9th International Congress on Energy Fluxes and Radiation Effects. 2024.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research

Harvard

Богословцева, АЛ, Капишников, АВ, Шаяпов, ВР, Чепкасов, СЮ & Гейдт, ПВ 2024, THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. in 9th International Congress on Energy Fluxes and Radiation Effects. 9th International Congress on Energy Fluxes and Radiation Effects, Томск, Russian Federation, 16.09.2024.

APA

Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю., & Гейдт, П. В. (2024). THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. In 9th International Congress on Energy Fluxes and Radiation Effects

Vancouver

Богословцева АЛ, Капишников АВ, Шаяпов ВР, Чепкасов СЮ, Гейдт ПВ. THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. In 9th International Congress on Energy Fluxes and Radiation Effects. 2024

Author

Богословцева, Алена Леонидовна ; Капишников, Александр Владимирович ; Шаяпов, Владимир Равильевич et al. / THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING. 9th International Congress on Energy Fluxes and Radiation Effects. 2024.

BibTeX

@inproceedings{9c80c7c21e2e4e8bbed7ee2f5f1bc129,
title = "THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING",
author = "Богословцева, {Алена Леонидовна} and Капишников, {Александр Владимирович} and Шаяпов, {Владимир Равильевич} and Чепкасов, {Сергей Юрьевич} and Гейдт, {Павел Викторович}",
note = "The work was supported by the Ministry of Science and Higher Education of the Russian Federation (project No. FSUS-2024-0020) ; 9th International Congress on Energy Fluxes and Radiation Effects ; Conference date: 16-09-2024 Through 21-09-2024",
year = "2024",
language = "English",
booktitle = "9th International Congress on Energy Fluxes and Radiation Effects",
url = "https://efre.ru/",

}

RIS

TY - GEN

T1 - THE OBTAINING ALUMINUM NITRIDE FILMS ON THE ALUMINUM SUBLAYER BY PULSED DC MAGNETRON SPUTTERING

AU - Богословцева, Алена Леонидовна

AU - Капишников, Александр Владимирович

AU - Шаяпов, Владимир Равильевич

AU - Чепкасов, Сергей Юрьевич

AU - Гейдт, Павел Викторович

N1 - Conference code: 9

PY - 2024

Y1 - 2024

UR - https://efre.ru/files/abstracts/C4-P-011902-1710235141-q8lI.pdf

M3 - Conference contribution

BT - 9th International Congress on Energy Fluxes and Radiation Effects

T2 - 9th International Congress on Energy Fluxes and Radiation Effects

Y2 - 16 September 2024 through 21 September 2024

ER -

ID: 65177816