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Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases. / Николаев, Иван Владимирович; Стишенко, Павел Викторович; Коробейщиков, Николай Геннадьевич et al.

In: AIP Conference Proceedings, Vol. 2784, 040005, 26.07.2023.

Research output: Contribution to journal › Article › peer-review

Harvard

Николаев, ИВ, Стишенко, ПВ, Коробейщиков, НГ & Яковлев, ВВ 2023, 'Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases', AIP Conference Proceedings, vol. 2784, 040005. https://doi.org/10.1063/5.0140411

APA

Николаев, И. В., Стишенко, П. В., Коробейщиков, Н. Г., & Яковлев, В. В. (2023). Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases. AIP Conference Proceedings, 2784, [040005]. https://doi.org/10.1063/5.0140411

Vancouver

Николаев ИВ, Стишенко ПВ, Коробейщиков НГ, Яковлев ВВ. Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases. AIP Conference Proceedings. 2023 Jul 26;2784:040005. doi: 10.1063/5.0140411

Author

Николаев, Иван Владимирович ; Стишенко, Павел Викторович ; Коробейщиков, Николай Геннадьевич et al. / Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases. In: AIP Conference Proceedings. 2023 ; Vol. 2784.

BibTeX

@article{5d878b6e7cbd4d48b3d651d9ac8f2f3d,
title = "Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases",
abstract = "The use of gas cluster ion beams makes it possible to diagnose and uniquely modify the surfaces of different materials. In this work, the influence of neon, argon, and krypton clusters on silicon dioxide is studied by the molecular dynamics method. The interaction of noble gases with solid is simulation at oblique incidence and with the following cluster parameters: cluster size N = 561 atom/cluster and total kinetic cluster energy E = 22 keV. Different selectivity of sputtering is revealed and images of the cross-section of craters with different gases are presented. Among the sputtered products, the oxygen atoms are predominated. It is shown that the heavier the cluster, the less the depth of the resulting crater.",
author = "Николаев, {Иван Владимирович} and Стишенко, {Павел Викторович} and Коробейщиков, {Николай Геннадьевич} and Яковлев, {Владимир Владимирович}",
note = "ACKNOWLEDGMENTS: This study was supported by the Russian Science Foundation (grant No. 21-19-00046). The Novosibirsk State University Computer Center is gratefully acknowledged for providing supercomputer facilities. ",
year = "2023",
month = jul,
day = "26",
doi = "10.1063/5.0140411",
language = "English",
volume = "2784",
journal = "AIP Conference Proceedings",
issn = "0094-243X",
publisher = "American Institute of Physics",

}

RIS

TY - JOUR

T1 - Simulation of Surface Sputtering of Fused Quartz by Clusters of Different Gases

AU - Николаев, Иван Владимирович

AU - Стишенко, Павел Викторович

AU - Коробейщиков, Николай Геннадьевич

AU - Яковлев, Владимир Владимирович

N1 - ACKNOWLEDGMENTS: This study was supported by the Russian Science Foundation (grant No. 21-19-00046). The Novosibirsk State University Computer Center is gratefully acknowledged for providing supercomputer facilities.

PY - 2023/7/26

Y1 - 2023/7/26

N2 - The use of gas cluster ion beams makes it possible to diagnose and uniquely modify the surfaces of different materials. In this work, the influence of neon, argon, and krypton clusters on silicon dioxide is studied by the molecular dynamics method. The interaction of noble gases with solid is simulation at oblique incidence and with the following cluster parameters: cluster size N = 561 atom/cluster and total kinetic cluster energy E = 22 keV. Different selectivity of sputtering is revealed and images of the cross-section of craters with different gases are presented. Among the sputtered products, the oxygen atoms are predominated. It is shown that the heavier the cluster, the less the depth of the resulting crater.

AB - The use of gas cluster ion beams makes it possible to diagnose and uniquely modify the surfaces of different materials. In this work, the influence of neon, argon, and krypton clusters on silicon dioxide is studied by the molecular dynamics method. The interaction of noble gases with solid is simulation at oblique incidence and with the following cluster parameters: cluster size N = 561 atom/cluster and total kinetic cluster energy E = 22 keV. Different selectivity of sputtering is revealed and images of the cross-section of craters with different gases are presented. Among the sputtered products, the oxygen atoms are predominated. It is shown that the heavier the cluster, the less the depth of the resulting crater.

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85176732815&origin=inward&txGid=1febd4f53d91e74f1734774313527682

U2 - 10.1063/5.0140411

DO - 10.1063/5.0140411

M3 - Article

VL - 2784

JO - AIP Conference Proceedings

JF - AIP Conference Proceedings

SN - 0094-243X

M1 - 040005

ER -

ID: 53262407