Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | CLUSTER ION TREATMENT OF THE SURFACE OF SINGLE-CRYSTAL SILICON AND GERMANIUM AT AN ANGLE OF 60° |
|---|---|
| Original language | Russian |
| Article number | 8 |
| Pages (from-to) | 60-64 |
| Number of pages | 5 |
| Journal | Поверхность. Рентгеновские, синхротронные и нейтронные исследования |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2025 |
ID: 68110429