Алена Леонидовна Богословцева - Research output › Research Explorer

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2025
Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering
Шаяпов, В. Р., Богословцева, А. Л., Чепкасов, С. Ю., Капишников, А. В., Milekhin, I., Миронова, М. И. & Гейдт, П. В., 17 Dec 2025, In: Physica Scripta. 100, 12, 9 p., 125935.
Research output: Contribution to journal › Article › peer-review

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ID: 3496846