1. 2022
  2. 2021
  3. Способ и устройство управления концентрацией азота в пленках AlN получаемых при магнетронном распылении

    Гейдт, П. В. & Чепкасов, С. Ю., 29 Dec 2021, Редакционно-издательский центр НГУ, Patent No. 52, Priority date 28 Dec 2021

    Research output: Patent › Know-how registration

  4. 2020
  5. The effect of the substrate spatial orientation on the properties of amorphous carbon coatings deposited from pulse plasma flows

    Chepkasov, S., Khomyakov, M., Zolkin, A., Maksimovskii, E. & Piliptsou, D., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 856-862 7 p. 9242030. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  6. 2018
  7. Properties of ta-C coatings prepared by pulsed cathodic arc source at various distances

    Chepkasov, S., Zolkin, A., Piliptsou, D., Gladkikh, E. & Kravchuk, K., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 6 p., 032066.

    Research output: Contribution to journal › Conference article › peer-review

  8. Synthesis of amorphous hydrogenated carbon (a-C: H) films on Germanium by the use of the linear anode layer source

    Zolkin, A., Semerikova, A., Chepkasov, S. & Khomyakov, M., 27 Nov 2018, In: Journal of Physics: Conference Series. 1115, 3, 6 p., 032095.

    Research output: Contribution to journal › Conference article › peer-review

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