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The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering. / Богословцева, Алена Леонидовна; Капишников, Александр Владимирович; Шаяпов, Владимир Равильевич et al.

PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS . 2024.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Богословцева, АЛ, Капишников, АВ, Шаяпов, ВР, Чепкасов, СЮ & Гейдт, ПВ 2024, The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering. in PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS . https://doi.org/10.56761/EFRE2024.C4-P-011902

APA

Богословцева, А. Л., Капишников, А. В., Шаяпов, В. Р., Чепкасов, С. Ю., & Гейдт, П. В. (2024). The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering. In PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS https://doi.org/10.56761/EFRE2024.C4-P-011902

Vancouver

Богословцева АЛ, Капишников АВ, Шаяпов ВР, Чепкасов СЮ, Гейдт ПВ. The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering. In PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS . 2024 doi: 10.56761/EFRE2024.C4-P-011902

Author

Богословцева, Алена Леонидовна ; Капишников, Александр Владимирович ; Шаяпов, Владимир Равильевич et al. / The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering. PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS . 2024.

BibTeX

@inproceedings{5a7c293ea2244aba81abfda6b58c4a35,
title = "The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering",
author = "Богословцева, {Алена Леонидовна} and Капишников, {Александр Владимирович} and Шаяпов, {Владимир Равильевич} and Чепкасов, {Сергей Юрьевич} and Гейдт, {Павел Викторович}",
year = "2024",
doi = "10.56761/EFRE2024.C4-P-011902",
language = "English",
booktitle = "PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS",

}

RIS

TY - GEN

T1 - The obtaining aluminum nitride films on the aluminum sublayer by pulsed DC magnetron sputtering

AU - Богословцева, Алена Леонидовна

AU - Капишников, Александр Владимирович

AU - Шаяпов, Владимир Равильевич

AU - Чепкасов, Сергей Юрьевич

AU - Гейдт, Павел Викторович

PY - 2024

Y1 - 2024

U2 - 10.56761/EFRE2024.C4-P-011902

DO - 10.56761/EFRE2024.C4-P-011902

M3 - Conference contribution

BT - PROCEEDINGS OF 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS

ER -

ID: 61324311