Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment. / Николаев, Иван Владимирович; Коробейщиков, Николай Геннадьевич; Лапега, Алина Витальевна.
9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS (EFRE-2024): Abstracts. Новосибирск : Академиздат, 2024. p. 291.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
}
TY - GEN
T1 - Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment
AU - Николаев, Иван Владимирович
AU - Коробейщиков, Николай Геннадьевич
AU - Лапега, Алина Витальевна
N1 - Conference code: 9
PY - 2024/9/16
Y1 - 2024/9/16
M3 - Conference contribution
SN - 978-5-605-24218-5
SP - 291
BT - 9TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS (EFRE-2024)
PB - Академиздат
CY - Новосибирск
T2 - 9th International Congress on Energy Fluxes and Radiation Effects
Y2 - 16 September 2024 through 21 September 2024
ER -
ID: 65215120