Research output: Contribution to conference › Abstract › peer-review
Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment. / Николаев, Иван Владимирович; Коробейщиков, Николай Геннадьевич; Лапега, Алина Витальевна.
2024. 291 Abstract from 9th International Congress on Energy Fluxes and Radiation Effects, Томск, Russian Federation.Research output: Contribution to conference › Abstract › peer-review
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TY - CONF
T1 - Surface nanostructuring of single-crystal silicon and germanium by cluster ion treatment
AU - Николаев, Иван Владимирович
AU - Коробейщиков, Николай Геннадьевич
AU - Лапега, Алина Витальевна
N1 - Conference code: 9
PY - 2024/9/16
Y1 - 2024/9/16
M3 - Abstract
SP - 291
T2 - 9th International Congress on Energy Fluxes and Radiation Effects
Y2 - 16 September 2024 through 21 September 2024
ER -
ID: 61167286