Research output: Contribution to conference › Abstract › peer-review
| Translated title of the contribution | Наноструктурирование поверхности монокристаллических кремния и германия ионно-кластерной обработкой |
|---|---|
| Original language | English |
| Pages | 291 |
| Number of pages | 1 |
| Publication status | Published - 16 Sept 2024 |
| Event | 9th International Congress on Energy Fluxes and Radiation Effects - Томск, Russian Federation Duration: 16 Sept 2024 → 21 Sept 2024 Conference number: 9 https://efre.ru/ |
| Conference | 9th International Congress on Energy Fluxes and Radiation Effects |
|---|---|
| Abbreviated title | EFRE-2024 |
| Country/Territory | Russian Federation |
| City | Томск |
| Period | 16.09.2024 → 21.09.2024 |
| Internet address |
ID: 61167286