Silicon oxides and silicon nitrides › Research Explorer

DOI

https://doi.org/10.1117/12.2521759
Final published version

V. A. Volodin
G. N. Kamaev
V. N. Kruchinin
V. A. Gritsenko

Original language	English
Title of host publication	International Conference on Micro- and Nano-Electronics 2018
Editors	Vladimir F. Lukichev, Konstantin V. Rudenko
Publisher	The International Society for Optical Engineering
Pages	33
Number of pages	8
Volume	11022
ISBN (Electronic)	9781510627093
ISBN (Print)	9781510627093
DOIs	https://doi.org/10.1117/12.2521759
Publication status	Published - 1 Jan 2019
Event	International Conference on Micro- and Nano-Electronics 2018 - Zvenigorod, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018

Publication series

Name	Proceedings of SPIE
Publisher	SPIE-INT SOC OPTICAL ENGINEERING
Volume	11022
ISSN (Print)	0277-786X

Conference

Conference	International Conference on Micro- and Nano-Electronics 2018
Abbreviated title	ICMNE 2018
Country/Territory	Russian Federation
City	Zvenigorod
Period	01.10.2018 → 05.10.2018

Research areas

memristors, random bonding model, random mixture model, silicon nitride, silicon oxide

ID: 19039057