Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation › Research Explorer

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Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1007/s11090-022-10286-8
Final published version

Original language	English
Pages (from-to)	1223-1235
Number of pages	13
Journal	Plasma Chemistry and Plasma Processing
Volume	42
Issue number	6
Early online date	21 Sept 2022
DOIs	https://doi.org/10.1007/s11090-022-10286-8
Publication status	Published - Nov 2022

OECD FOS+WOS

1.03 PHYSICAL SCIENCES AND ASTRONOMY
2.04 CHEMICAL ENGINEERING
1.04 CHEMICAL SCIENCES
2.05 MATERIALS ENGINEERING

Research areas

Gas cluster ion, MD simulation, Selective sputtering, Surface sputtering

ID: 37865532