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Near-field infrared spectroscopy of SiOx nanowires. / Milekhin, I. A.; Kozhukhov, A. S.; Sheglov, D. V. et al.

In: Applied Surface Science, Vol. 584, 152583, 15.05.2022.

Research output: Contribution to journal › Article › peer-review

Harvard

Milekhin, IA, Kozhukhov, AS, Sheglov, DV, Fedina, LI, Milekhin, AG, Latyshev, AV & Zahn, DRT 2022, 'Near-field infrared spectroscopy of SiOx nanowires', Applied Surface Science, vol. 584, 152583. https://doi.org/10.1016/j.apsusc.2022.152583

APA

Milekhin, I. A., Kozhukhov, A. S., Sheglov, D. V., Fedina, L. I., Milekhin, A. G., Latyshev, A. V., & Zahn, D. R. T. (2022). Near-field infrared spectroscopy of SiOx nanowires. Applied Surface Science, 584, [152583]. https://doi.org/10.1016/j.apsusc.2022.152583

Vancouver

Milekhin IA, Kozhukhov AS, Sheglov DV, Fedina LI, Milekhin AG, Latyshev AV et al. Near-field infrared spectroscopy of SiOx nanowires. Applied Surface Science. 2022 May 15;584:152583. doi: 10.1016/j.apsusc.2022.152583

Author

Milekhin, I. A. ; Kozhukhov, A. S. ; Sheglov, D. V. et al. / Near-field infrared spectroscopy of SiOx nanowires. In: Applied Surface Science. 2022 ; Vol. 584.

BibTeX

@article{2b0b5b45f66d40a998656625f9ffb0f3,
title = "Near-field infrared spectroscopy of SiOx nanowires",
abstract = "Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.",
keywords = "Atomic force microscopy, Local anodic oxidation, Near-field infrared spectroscopy, Optical phonons, Silicon oxide nanowire",
author = "Milekhin, {I. A.} and Kozhukhov, {A. S.} and Sheglov, {D. V.} and Fedina, {L. I.} and Milekhin, {A. G.} and Latyshev, {A. V.} and Zahn, {D. R.T.}",
note = "Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",
year = "2022",
month = may,
day = "15",
doi = "10.1016/j.apsusc.2022.152583",
language = "English",
volume = "584",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Near-field infrared spectroscopy of SiOx nanowires

AU - Milekhin, I. A.

AU - Kozhukhov, A. S.

AU - Sheglov, D. V.

AU - Fedina, L. I.

AU - Milekhin, A. G.

AU - Latyshev, A. V.

AU - Zahn, D. R.T.

N1 - Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: © 2022 Elsevier B.V.

PY - 2022/5/15

Y1 - 2022/5/15

N2 - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

AB - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

KW - Atomic force microscopy

KW - Local anodic oxidation

KW - Near-field infrared spectroscopy

KW - Optical phonons

KW - Silicon oxide nanowire

UR - http://www.scopus.com/inward/record.url?scp=85123782754&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2022.152583

DO - 10.1016/j.apsusc.2022.152583

M3 - Article

AN - SCOPUS:85123782754

VL - 584

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

M1 - 152583

ER -

ID: 35380045