Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Near-field infrared spectroscopy of SiOx nanowires. / Milekhin, I. A.; Kozhukhov, A. S.; Sheglov, D. V. и др.
в: Applied Surface Science, Том 584, 152583, 15.05.2022.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Near-field infrared spectroscopy of SiOx nanowires
AU - Milekhin, I. A.
AU - Kozhukhov, A. S.
AU - Sheglov, D. V.
AU - Fedina, L. I.
AU - Milekhin, A. G.
AU - Latyshev, A. V.
AU - Zahn, D. R.T.
N1 - Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: © 2022 Elsevier B.V.
PY - 2022/5/15
Y1 - 2022/5/15
N2 - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.
AB - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.
KW - Atomic force microscopy
KW - Local anodic oxidation
KW - Near-field infrared spectroscopy
KW - Optical phonons
KW - Silicon oxide nanowire
UR - http://www.scopus.com/inward/record.url?scp=85123782754&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2022.152583
DO - 10.1016/j.apsusc.2022.152583
M3 - Article
AN - SCOPUS:85123782754
VL - 584
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
M1 - 152583
ER -
ID: 35380045